oxynitride

oxynitride
оксинитрид

silicon oxynitride оксинитрид кремния SiON2 (керамический материал, образующийся при спекании кварца и нитрида кремния; диэлектрик, используется в микроэлектронике в качестве материала защитных плёнок и подложек)


English-Russian dictionary of aviation and space materials . 1972.

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Смотреть что такое "oxynitride" в других словарях:

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